空間直線度誤差無衍射光莫爾條紋測量方法的研究.pdf

1、華中科技大學博士學位論文空間直線度誤差無衍射光莫爾條紋測量方法的研究姓名：張新寶申請學位級別：博士專業(yè)：機械制造及其自動化指導教師：李柱趙斌2002.9.30華中科技大學博士學位論文AbstractTherelevanttechniquesformeasuringspatialstraightnesserrorusingnondiffractingbeamandmoir6fringetechnologyaredescribedinthi

2、sdissertationStraightnesserrormeasurementiswidelyappliedinmanufacturingprecisemachines，installinglargeconstructions，fixinghigh—speedorbits，testinggreatdamdeformation，manufacturinglargeaviateprobes，etcWimtherapiddevelopme

3、ntofeconomyandothertechnologies，moreadvancedandsophisticatedmeasuringtechnologiesforstraightnesserrorarerequiredAnewstraightnesserrormeasurementtechnologyiSdevelopedinthisdissertation，combiningthenovelnon—diffractingbeam

4、technologywiththetraditionalmoirdfringetechnology111isisanewstudyoftheapplicationsofthenondiffractingbeamintheprecisemeasurementfield111emainresearchesandcreativepointsareasfollows：1Basedonthetheoryandtheexperimentresult

5、s，itisproposedandprovedfortllefirsttimethatthenondiffractingbeam，whichiSproducedwhenthesphericalincidentbeamilluminatesaxiconlens，iSlessinfluencedbythedeflectionoftheincidentbeamthanthatproducedwhentheincidentplanewavedo

6、esandhasastablerlightaxisTherefore。theaxisofnondiffractingbeamiSavailableasadatumlineofcontinuousspatialstraightnesserrormeasurement，regardlessofalong，middleorshortdistance2Themeasurementmethodcombiningnondiffractingbeam

7、withthemoirdfringetechnologyforspatialstraightnesserrorisproposedandprovedtheoreticallyandpractically111enon—diffractingbeamCanproduceaseriesofspatialBesselringsthatareindependentonthechangesofitspropagationdistance，andt

8、hesetofthecentersofthoseBesselringscanbeUSedasthedatumIineofstraightnesserrormeasurementWhentheBesselringsilluminateonecirculargratingwhosepitcheskeepconstantornot，moir6fringeswillbegeneratedWhenthecirculargratingmovesto

9、theBesselringsmoir6fringeswillchangeSobothoftheXdirectionandtheYdirectiondisplacementsCanbeobtainedfromthemoir6fringesThen，thespatialstraightnesseiiormeasurementcanberealizedTherefore，thisiSacreativestudyofstraightnesser

10、rormeasurementThismethodCanrealizecontinuoushighprecisionmeasurementeffectively，becausethemeasuringpitchalongthezaxisdirectionCanbearrangedfreely3Therecognitionofmoir6fringeimageisoneofthekeytechniquesofthismeasurementme

11、thod，SOthisdissertationdevelopsspecialsoftwareofimageprocesssuitableforthemoirdfringeimages4Basedontheproposedmeasurementmethod，alasercollimatingtrackingandpositioningsystemusingnondiffractingbeamandmoirdfringetechnology